Description
Basic research in thin film and nanofilm physics has grown thanks to the fast development of
low-dimensional film technology and the strict needs for stability and repeatability in
electronic applications. The industry realized that an inadequate understanding of the basic
laws of film formation could not reliably meet its demands. This book provides comprehensive
coverage of basic theory, growth processes, deposition and fabrication, properties,
characterization measurements, and applications of thin films and nanofilms. The book also
reviews the latest developments in thin films and nanofilms and discusses future directions.
Topics included in this book are: Physics of Thin Films and Nanofilms (Chapter 1), Growth of
Thin Films and Nanofilms (Chapter 2), Deposition and Fabrication Techniques of Thin Films
and Nanofilms (Chapter 3), Properties of Thin Films and Nanofilms (Chapter 4),
Characterizations of Thin Films and Nanofilms (Chapter 5), and Applications of Thin Films
And Nanofilms (Chapter 6).
With its balanced coverage of theory, experiment, simulation, and some homework
problems, this book will be essential reading in undergraduate and postgraduate courses on
thin films. It is also a valuable resource for researchers in nanostructures and devices.
